In-situ ellipsometry-guided wet cleaning to achieve imaging-grade GaAs on small epi-ready wafers (EpiClean)

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Description

The project develops and validates a chemical, non-mechanical cleaning process to obtain imaging-grade, epitaxy-ready GaAs for small (<1 inch) photocathode wafers used in infrared and night vision equipment.

The Achievable Results

An in-situ spectroscopic ellipsometry method will be created and developed, supported by atomic force microscopy and X-ray photoelectron spectroscopy measurements, with regard to the control process and its parameter boundary values.

The Anticipated Benefit

The project will result in the creation of a cleaning and drying process, as well as initial design for future industrial equipment.

The Allocated Funding

160,000 EUR on 03/01/2026.

Team

PhD. Ainārs Ozols
Leading Researcher ainars.ozols@cfi.lu.lv
Dr. Phys. Vladimirs Pankratovs
Leading Researcher
Dr. phys. Laima Trinklere
Senior Researcher
Dzintars Berzins
Research assistant
Ciro Federico Tipaldi
Research assistant
Ilona Vanaga
Dace Līduma

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